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Based on analysis of physical mechanics on optical proximity effect, we present a new method for fine correction of optical proximity effect and point out that the optimum of amplitude distribution on mask can improve distribution of spatial frequency spectrum, so intensity distribution of printed image near ideal distribution can be obtained. The simulation results show that deviation between contour of image after OPC and contour of ideal image is less than 0.009. ©2003 Copyright SPIE - The International Society for Optical Engineering.

Original publication

DOI

10.1117/12.310722

Type

Conference paper

Publication Date

01/12/1998

Volume

3334

Pages

932 - 938