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Enclosed nanofluidic channels have been made in a bilayer process which involves UV cured imprinting of SU-8 and sealing of the channels by thermal bonding of second layer of SU-8 photoresist. With this process we can fabricate nanochannels with depth ranging from 200 to 500 nm. The sealing process was optimized, taking into account of the SU-8 glass transition temperature and the cause of defects generated during thermal bonding. The fabricated nanofluidic channels were characterized using spontaneous capillary filling with dyed water, demonstrating good quality of sealing. Crown Copyright © 2009.

Original publication

DOI

10.1016/j.mee.2009.01.070

Type

Journal article

Journal

Microelectronic Engineering

Publication Date

01/04/2009

Volume

86

Pages

1347 - 1349