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A series of optimized micro-fabrication processes for terahertz meta-materials, including left-handed materials and split ring resonators (SRR), are demonstrated and these meta-materials are measured using a transmission spectroscopy in terahertz time domain. The traditional fabrication processes of terahertz meta-materials were optimized, which enabled to fabricate large area and high quality meta-material samples. The transmission spectra of SRR samples which were fabricated with conventional and optimized microfabrication processes were calculated. By comparing these spectra, it is found that the quality of samples has an immediate influence on the transmission properties of meta-materials. © 2006 Elsevier B.V. All rights reserved.

Original publication




Journal article


Microelectronic Engineering

Publication Date





1364 - 1367