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The performance of attenuated PSMs was characterised by light transmission and side-lobe effects for dense contacts, isolated contacts, line/space arrays and isolated lines. Log-intensity slope and depth of focus for these features were compared at transmission up to 15%. The printability of side-lobes was analysed and compared with i-line printed resist images. © 1995 Elsevier Science B.V. All rights reserved.

Original publication

DOI

10.1016/0167-9317(94)00102-Z

Type

Journal article

Journal

Microelectronic Engineering

Publication Date

01/01/1995

Volume

27

Pages

259 - 262