Transmission and side-lobe effect in attenuated phase shift masks
Cui Z., Prewett PD., Johnson S.
The performance of attenuated PSMs was characterised by light transmission and side-lobe effects for dense contacts, isolated contacts, line/space arrays and isolated lines. Log-intensity slope and depth of focus for these features were compared at transmission up to 15%. The printability of side-lobes was analysed and compared with i-line printed resist images. © 1995 Elsevier Science B.V. All rights reserved.