Modified proximity function for OPC in laser direct writing
Du J., Gao F., Zhang Y., Guo Y., Du C., Cui Z.
Based on the energy conservation law, a modified proximity function is proposed to describe the absorbed energy distribution in photoresist during laser writing. The measured data for photoresist absorbing energy are fitted well to the modified proximity function. We analyze the proximity effect in laser writing by using the new model, it is helpful to further develop the precompensation and multi-exposure methods to correct proximity effects in laser direct writing.