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Based on the energy conservation law, a modified proximity function is proposed to describe the absorbed energy distribution in photoresist during laser writing. The measured data for photoresist absorbing energy are fitted well to the modified proximity function. We analyze the proximity effect in laser writing by using the new model, it is helpful to further develop the precompensation and multi-exposure methods to correct proximity effects in laser direct writing.

Type

Conference paper

Publication Date

01/01/2000

Volume

4000