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A monolithically integrated microliter PCR (polymerase chain reaction) biochip has been designed and fabricated for DNA amplification. It consists of a vessel made in silicon, platinum thin film heater deposited on to the bottom of the vessel and a temperature sensor. A miniaturized thermal cycling system was designed with a PIC microcontroller to provide heating power and control of thermal cycling. The volume of PCR vessel is approximately 2 μ1. It has a low time constant of thermal cycling, with the maximal heating rate over 15 °C/s and cooling rate at around 10 °C/s. This paper reports the PCR vessel structure, chip package problems and solutions, its thermal uniformity analysis, thermal cycling properties and the result of amplification. The result has demonstrated that the integrated PCR biochip can provide rapid heat generation and dissipation and improved temperature uniformity in DNA amplification. © 2003 Elsevier B.V. All rights reserved.

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Conference paper

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162 - 167