Fine OPC approach with gray-tone coding mask
Du J., Su J., Huang Q., Zhang Y., Guo Y., Du C., Cui Z.
A gray-tone coding mask is proposed as a novel alternative for gray-tone mask for fine optical proximity correction applications. The equivalent relationship of gray-tone coding and gray-tone masks is analyzed. The gray-tone coding mask adds freedom to proximity correction, shortens the simulating calculation time, improves the correction accuracy, and is in favor of analyzing the proximity effect and the correction mechanism.