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A gray-tone coding mask is proposed as a novel alternative for gray-tone mask for fine optical proximity correction applications. The equivalent relationship of gray-tone coding and gray-tone masks is analyzed. The gray-tone coding mask adds freedom to proximity correction, shortens the simulating calculation time, improves the correction accuracy, and is in favor of analyzing the proximity effect and the correction mechanism.


Journal article


Proceedings of SPIE - The International Society for Optical Engineering

Publication Date





348 - 351