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A new technique to fabricate arbitrarily shaped microstructures by using LCD (liquid crystal display) real-time mask is reported in this paper. Its principle and design method are explained. Based on partial coherent imaging theory, the process to fabricate micro-axicon array and zigzag grating has been simulated. The experiment using a color LCD as real-time mask has been set up. Micro-axicon array and zigzag grating has been fabricated by the LCD real-time mask technique. The 3D surface relief structures were made on pan chromatic silver-halide sensitized gelatin (Kodak-131) with trypsinase etching. The pitch size of zigzag grating is 46.26μm, and the etching depth is 0.902μm. The caliber of axicon is 118.7μm, and the etching depth is 1.332μm.

Original publication

DOI

10.1117/12.462879

Type

Journal article

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Publication Date

01/01/2002

Volume

4755

Pages

748 - 754