LCD real-time mask technique for fabrication of arbitrarily shaped microstructure
Peng Q., Guo Y., Chen B., Du J., Xiang J., Cui Z.
A new technique to fabricate arbitrarily shaped microstructures by using LCD (liquid crystal display) real-time mask is reported in this paper. Its principle and design method are explained. Based on partial coherent imaging theory, the process to fabricate micro-axicon array and zigzag grating has been simulated. The experiment using a color LCD as real-time mask has been set up. Micro-axicon array and zigzag grating has been fabricated by the LCD real-time mask technique. The 3D surface relief structures were made on pan chromatic silver-halide sensitized gelatin (Kodak-131) with trypsinase etching. The pitch size of zigzag grating is 46.26μm, and the etching depth is 0.902μm. The caliber of axicon is 118.7μm, and the etching depth is 1.332μm.