An integrated biochip design and fabrication
Zhao Z., Cui D., Xia S., Cui Z.
Polymerase chain reaction (PCR) microvessel, capillary electrophoresis (CE) microchannel and impedance electrodes were integrated in a monolithic biochip. This paper reports on the detailed designs and fabrications of the PCR-CE-detector integrated biochip. The CE microchannel and PCR microvessel were fabricated with PDMS poured on a master made by SU-8 photoresist. The electrode plate was integrated with Au heater and temperature sensor for PCR amplification, electrodes for CE separation and impedance detection. The structure of the microfluidic channel was introduced and the impedance of microelectrodes on the chip was simulated.