Development of high power RF mems switches
Hong JS., Tan SG., Cui Z., Wang L., Greed RB., Voyce DC.
This paper reports on recent developments of high power RF MEMS switch. An approach using a matrix of switching elements for the development is introduced. The design and modelling of a 2 × 2 RF MEMS switch matrix of this type is described. The fabrication processes are presented. © 2004 IEEE.