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By applying energy conservation to the effect of a laser beam on a resist, a modified proximity function is proposed. The measured data on energy absorption in a photoresist are fitted well with the modified function. By using the new model, an effective precompensation method can be used to correct proximity effects in laser direct writing. Experimental results have been obtained on a laser direct writing machine with line width of 0.6 μm.

Original publication

DOI

10.1117/1.602426

Type

Journal article

Journal

Optical Engineering

Publication Date

01/03/2000

Volume

39

Pages

771 - 775