Fabrication of micronozzle array by surface moulding technique
© 2002 IEEE. In this paper, an alternative technique to fabrication micronozzle array is presented. The fabrication process is based on surface moulding technique. An array of cone shape structures is first etched on silicon surface. A metal layer is then conformably coated over the silicon cone array. The surface is planarised with photoresist and then etched back to expose the top end of the cones. A further metal etch opens up the top end. A subsequent silicon etching will release the coated metal sheet which has an array of micronozzles.