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A new computer simulation software called BEHAVE is introduced. The software has superior and friendly mutual interface and overall and high effective functions for calculation and simulation. It is a powerful tool to study the standing wave effect in micro-photolithography and simulating the whole photolithography process of microphotograph.

Type

Journal article

Journal

Weixi Jiagong Jishu/Microfabrication Technology

Publication Date

01/12/1998

Pages

61 - 66