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Pattern placement error (or pattern distortion) caused by different thermal expansions between templates and substrates in nanoimprint lithography is experimentally investigated. Using fabricated nanorulers, placement errors are quantitatively measured. Our results prove that nanoimprint lithography (NIL) with a heat cycle does have considerable error of pattern placement. But that is not the case with imprints at room temperature. This indicates that low-temperature or room-temperature imprints Should be effective Solutions. © 2006 Society of Photo-Optical Instrumentation Engineers.

Original publication

DOI

10.1117/1.2172991

Type

Journal article

Journal

Journal of Microlithography, Microfabrication and Microsystems

Publication Date

01/01/2006

Volume

5