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With the MEMS technology a biochemical reaction chip was fabricated successfully. It was an integrated chip with reaction chamber, heater and temperature sensor on it. The chamber was a completely etched silicon vessel with a bottom made of nitride membrane. The volume of the chamber was less than 2μl. In this paper, the chamber structure, heater configuration and its thermal uniformity were designed and simulated and the fabrication technology of the chip was illustrated. DNA PCR amplification on the chip was successfully demonstrated with HB template.

Original publication




Journal article


International Journal of Nonlinear Sciences and Numerical Simulation

Publication Date





219 - 222