Using E-beam direct writing method to fabricate low-efficiency beam sampling grating
Gao FH., Zeng YS., Xie SW., Guo YK., Cui Z.
As one of the important optical technique in the field of laser sampling, low-efficiency beam sampling grating (BSG) is widely used in high power laser system. It is an off-axis, binary phase, Fresnel zone plate. In this paper, the principle of the variable period grating formation process is analyzed perfectly and the transmission function of the BSG is obtained. Based on the analysis, a new method is presented to fabricate the BSG with electron-beam direct writing. Compared with the holographic method, the new method is simpler, cheaper, and more efficient to manufacture elements on a large scale.